Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10408754 | Method of measuring a target, substrate, metrology apparatus, and lithographic apparatus | Arie Jeffrey Den Boef | 2019-09-10 |
| 7800761 | Infrared interferometric-spatial-phase imaging using backside wafer marks | — | 2010-09-21 |
| 7535581 | Nanometer-level mix-and-match scanning tip and electron beam lithography using global backside position reference marks | — | 2009-05-19 |
| 7474410 | Nanometer-precision tip-to-substrate control and pattern registration for scanning-probe lithography | — | 2009-01-06 |
| 7247843 | Long-range gap detection with interferometric sensitivity using spatial phase of interference patterns | — | 2007-07-24 |
| 6522411 | Optical gap measuring apparatus and method having two-dimensional grating mark with chirp in one direction | Patrick N. Everett, Henry I. Smith | 2003-02-18 |
| 6088103 | Optical interference alignment and gapping apparatus | Patrick N. Everett, Henry I. Smith | 2000-07-11 |
| 5808742 | Optical alignment apparatus having multiple parallel alignment marks | Patrick N. Everett, Henry I. Smith | 1998-09-15 |
| 5414514 | On-axis interferometric alignment of plates using the spatial phase of interference patterns | Henry I. Smith, Alberto M. Modiano | 1995-05-09 |