Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7931850 | Nanometer-scale ablation using focused, coherent extreme ultraviolet/soft x-ray light | Carmen S. Menoni, Jorge J. Rocca, Georgiy O. Vaschenko, Scott Bloom, Weilun Chao +1 more | 2011-04-26 |
| 5142385 | Holographic lithography | Henry I. Smith, Mark Schattenburg | 1992-08-25 |
| 5136169 | Energy beam locating | Henry I. Smith, Mark Schattenburg | 1992-08-04 |
| 4890309 | Lithography mask with a .pi.-phase shifting attenuator | Henry I. Smith, Mark Schattenburg | 1989-12-26 |