Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8546264 | Etching radical controlled gas chopped deep reactive ion etching | Deirdre Olynick, Ivo Rangelow | 2013-10-01 |
| 7931850 | Nanometer-scale ablation using focused, coherent extreme ultraviolet/soft x-ray light | Carmen S. Menoni, Jorge J. Rocca, Georgiy O. Vaschenko, Scott Bloom, Erik H. Anderson +1 more | 2011-04-26 |