Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8546264 | Etching radical controlled gas chopped deep reactive ion etching | Ivo Rangelow, Weilun Chao | 2013-10-01 |
| 8512937 | Lithographic dry development using optical absorption | P. James Schuck, Martin Schmidt | 2013-08-20 |
| 8479311 | Device and method for an atomic force microscope for the study and modification of surface properties | Stefan Kubsky, Peter James Schuck, Jan Andries Meijer, Ivo Rangelow | 2013-07-02 |