Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE49732 | Charged particle lithography system with alignment sensor and beam measurement sensor | Paul IJmert Scheffers, Erwin Slot, Vincent Sylvester Kuiper, Niels Vergeer | 2023-11-21 |
| 10571498 | System for analysis of a microwave frequency signal by imaging | Mayeul Chipaux, Loic Toraille, Thierry Debuisschert, Christian Larat, Loic Morvan +1 more | 2020-02-25 |
| 9665014 | Charged particle lithography system with alignment sensor and beam measurement sensor | Paul IJmert Scheffers, Erwin Slot, Vincent Sylvester Kuiper, Niels Vergeer | 2017-05-30 |
| 9240306 | Device for spot size measurement at wafer level using a knife edge and a method for manufacturing such a device | Paul IJmert Scheffers, Abdourahmane Ange Sarr | 2016-01-19 |
| 9030675 | Method for determining a distance between two beamlets in a multi-beamlet exposure apparatus | — | 2015-05-12 |
| 8479311 | Device and method for an atomic force microscope for the study and modification of surface properties | Stefan Kubsky, Deirdre Olynick, Peter James Schuck, Ivo Rangelow | 2013-07-02 |
| 7126139 | Device and method of positionally accurate implantation of individual particles in a substrate surface | Thomas Schenkel, Ivo Rangelow | 2006-10-24 |