Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322569 | Method and system for fabricating unique chips using a charged particle multi-beamlet lithography system | Marcel Nicolaas Jacobus van Kervinck | 2025-06-03 |
| RE49952 | Beam grid layout | Erwin Slot | 2024-04-30 |
| RE49732 | Charged particle lithography system with alignment sensor and beam measurement sensor | Paul IJmert Scheffers, Jan Andries Meijer, Erwin Slot, Niels Vergeer | 2023-11-21 |
| 11688694 | Secure chips with serial numbers | Johannes Cornelis Jacobus De Langen, Marcel Nicolaas Jacobus van Kervinck | 2023-06-27 |
| RE48903 | Apparatus for transferring a substrate in a lithography system | Erwin Slot, Marcel Nicolaas Jacobus van Kervinck, Guido De Boer, Hendrik Jan De Jong | 2022-01-25 |
| 11152302 | Fabricating unique chips using a charged particle multi-beamlet lithography system | Marcel Nicolaas Jacobus van Kervinck, Marco Jan-Jaco Wieland | 2021-10-19 |
| 11137689 | Method and system for fabricating unique chips using a charged particle multi-beamlet lithography system | Marcel Nicolaas Jacobus van Kervinck | 2021-10-05 |
| 11004800 | Secure chips with serial numbers | Johannes Cornelis Jacobus De Langen, Marcel Nicolaas Jacobus van Kervinck | 2021-05-11 |
| 10714427 | Secure chips with serial numbers | Johannes Cornelis Jacobus De Langen, Marcel Nicolaas Jacobus van Kervinck | 2020-07-14 |
| 10600733 | Fabricating unique chips using a charged particle multi-beamlet lithography system | Marcel Nicolaas Jacobus van Kervinck, Marco Jan-Jaco Wieland | 2020-03-24 |
| 10522472 | Secure chips with serial numbers | Johannes Cornelis Jacobus De Langen, Marcel Nicolaas Jacobus van Kervinck | 2019-12-31 |
| 10418324 | Fabricating unique chips using a charged particle multi-beamlet lithography system | Marcel Nicolaas Jacobus van Kervinck, Marco Jan-Jaco Wieland | 2019-09-17 |
| 10079206 | Fabricating unique chips using a charged particle multi-beamlet lithography system | Marcel Nicolaas Jacobus van Kervinck, Marco Jan-Jaco Wieland | 2018-09-18 |
| 9934943 | Beam grid layout | Erwin Slot | 2018-04-03 |
| 9665014 | Charged particle lithography system with alignment sensor and beam measurement sensor | Paul IJmert Scheffers, Jan Andries Meijer, Erwin Slot, Niels Vergeer | 2017-05-30 |
| 9575418 | Apparatus for transferring a substrate in a lithography system | Erwin Slot, Marcel Nicolaas Jacobus van Kervinck, Guido De Boer, Hendrik Jan De Jong | 2017-02-21 |
| 9244726 | Network architecture for lithography machine cluster | Erwin Slot, Marcel Nicolaas Jacobus van Kervinck | 2016-01-26 |
| 9176397 | Apparatus for transferring a substrate in a lithography system | Erwin Slot, Marcel Nicolaas Jacobus van Kervinck, Guido De Boer, Hendrik Jan De Jong | 2015-11-03 |
| 8936994 | Method of processing a substrate in a lithography system | Erwin Slot, Marcel Nicolaas Jacobus van Kervinck, Guido De Boer, Hendrik Jan De Jong | 2015-01-20 |
| 8895943 | Lithography system and method of processing substrates in such a lithography system | Guido De Boer, Hendrik Jan De Jong, Erwin Slot | 2014-11-25 |