Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7671412 | Method and device for controlling temperature of a substrate using an internal temperature control device | Michael A. Carcasi | 2010-03-02 |
| 7478014 | Method and system for facilitating preventive maintenance of an optical inspection tool | David Dixon | 2009-01-13 |