Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12226796 | Bath systems and methods thereof | Michael A. Carcasi, Ihsan Simms, Joel Estrella, Antonio Luis Pacheco Rotondaro, Hiroshi Marumoto | 2025-02-18 |
| 12165870 | Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists | Steven Scheer, Michael A. Carcasi, Benjamen M. Rathsack, Mark H. Somervell | 2024-12-10 |
| 11998945 | Methods and systems to monitor, control, and synchronize dispense systems | Michael A. Carcasi, Mark H. Somervell | 2024-06-04 |
| 11738363 | Bath systems and methods thereof | Michael A. Carcasi, Ihsan Simms, Joel Estrella, Antonio Luis Pacheco Rotondaro, Hiroshi Marumoto | 2023-08-29 |
| 11637031 | Systems and methods for spin process video analysis during substrate processing | Michael A. Carcasi, Mark H. Somervell, Hiroyuki Iwaki, Masahide Tadokoro, Masashi Enomoto +2 more | 2023-04-25 |
| 11624607 | Hardware improvements and methods for the analysis of a spinning reflective substrates | Michael A. Carcasi | 2023-04-11 |
| 11474028 | Systems and methods for monitoring one or more characteristics of a substrate | Michael A. Carcasi, Mark H. Somervell, Masahide Tadokoro | 2022-10-18 |
| 11276157 | Systems and methods for automated video analysis detection techniques for substrate process | Joel Estrella, Michael A. Carcasi | 2022-03-15 |
| 11168978 | Hardware improvements and methods for the analysis of a spinning reflective substrates | Michael A. Carcasi | 2021-11-09 |
| 10809620 | Systems and methods for developer drain line monitoring | Michael A. Carcasi, Mark H. Somervell | 2020-10-20 |
| 10622233 | Amelioration of global wafer distortion based on determination of localized distortions of a semiconductor wafer | Nathan Ip, Joel Estrella, Anton J. deVilliers | 2020-04-14 |
| 10534266 | Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes | Michael A. Carcasi, Benjamen M. Rathsack, Seiji Nagahara | 2020-01-14 |
| 10403501 | High-purity dispense system | Anton J. deVilliers, Rodney L. Robison, Ronald Nasman, David Travis, James Grootegoed +2 more | 2019-09-03 |
| 10354872 | High-precision dispense system with meniscus control | Anton J. deVilliers, Rodney L. Robison, Ronald Nasman, David Travis, James Grootegoed +3 more | 2019-07-16 |
| 10262880 | Cover plate for wind mark control in spin coating process | Derek Bassett, Wallace P. Printz, Katsunori Ichino, Yuichi Terashita, Kousuke Yoshihara | 2019-04-16 |
| 10048587 | Method and apparatus for increased recirculation and filtration in a photoresist dispense system using a liquid empty reservoir | Michael A. Carcasi, Wallace P. Printz | 2018-08-14 |
| 10020195 | Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists | Steven Scheer, Michael A. Carcasi, Benjamen M. Rathsack, Mark H. Somervell | 2018-07-10 |
| 9711419 | Substrate backside texturing | Carlos A. Fonseca, Benjamen M. Rathsack, Jeffrey Smith, Anton J. deVilliers, Lior Huli +1 more | 2017-07-18 |
| 9618848 | Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes | Michael A. Carcasi, Benjamen M. Rathsack, Seiji Nagahara | 2017-04-11 |
| 9519227 | Metrology for measurement of photosensitizer concentration within photo-sensitized chemically-amplified resist (PS-CAR) | Michael A. Carcasi, Mark H. Somervell, Benjamen M. Rathsack, Seiji Nagahara | 2016-12-13 |
| 9454081 | Line pattern collapse mitigation through gap-fill material application | Mark H. Somervell, Benjamen M. Rathsack, Ian J. Brown, Steven Scheer | 2016-09-27 |
| 8795952 | Line pattern collapse mitigation through gap-fill material application | Mark H. Somervell, Benjamen M. Rathsack, Ian J. Brown, Steven Scheer | 2014-08-05 |