Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002687 | System and methods for wafer drying | Trace Hurd, Antonio Luis Pacheco Rotondaro, Hitoshi Kosugi | 2024-06-04 |
| 11515178 | System and methods for wafer drying | Trace Hurd, Antonio Luis Pacheco Rotondaro, Hitoshi Kosugi | 2022-11-29 |
| 11376640 | Apparatus and method to electrostatically remove foreign matter from substrate surfaces | Antonio Luis Pacheco Rotondaro, Trace Hurd, Ihsan Simms | 2022-07-05 |
| 10916440 | Process and apparatus for processing a nitride structure without silica deposition | Wallace P. Printz, Antonio Luis Pacheco Rotondaro, Teruomi Minami, Takahiro Furukawa | 2021-02-09 |
| 10886290 | Etching of silicon nitride and silica deposition control in 3D NAND structures | Antonio Luis Pacheco Rotondaro, Ihsan Simms, Trace Hurd | 2021-01-05 |
| 10515820 | Process and apparatus for processing a nitride structure without silica deposition | Wallace P. Printz, Antonio Luis Pacheco Rotondaro, Teruomi Minami, Takahiro Furukawa | 2019-12-24 |
| 10262880 | Cover plate for wind mark control in spin coating process | Wallace P. Printz, Joshua Hooge, Katsunori Ichino, Yuichi Terashita, Kousuke Yoshihara | 2019-04-16 |
| 10256163 | Method of treating a microelectronic substrate using dilute TMAH | Wallace P. Printz, Shuhei Takahashi, Naoyuki Okamura, Masami Yamashita, Antonio Luis Pacheco Rotondaro | 2019-04-09 |
| 10062586 | Chemical fluid processing apparatus and chemical fluid processing method | Wallace P. Printz, Gentaro Goshi, Hisashi Kawano, Yoshihiro Kai | 2018-08-28 |