Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362202 | Substrate processing method and substrate processing apparatus | Fumihiro Kamimura, Masatoshi Kasahara, Ikuo Sunaka | 2025-07-15 |
| 11869777 | Substrate processing method and substrate processing apparatus | Fumihiro Kamimura, Masatoshi Kasahara, Ikuo Sunaka | 2024-01-09 |
| 11201050 | Substrate processing method, recording medium and substrate processing apparatus | Itaru Kanno, Hiromi Kiyose, Gentaro Goshi, Naohiko Hamamura, Takuro Masuzumi +2 more | 2021-12-14 |
| 10916440 | Process and apparatus for processing a nitride structure without silica deposition | Derek Bassett, Wallace P. Printz, Antonio Luis Pacheco Rotondaro, Takahiro Furukawa | 2021-02-09 |
| 10515820 | Process and apparatus for processing a nitride structure without silica deposition | Derek Bassett, Wallace P. Printz, Antonio Luis Pacheco Rotondaro, Takahiro Furukawa | 2019-12-24 |
| 10026629 | Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium storing substrate liquid processing program | Mitsunori Nakamori, Junichi Kitano | 2018-07-17 |
| 9362106 | Substrate processing method, substrate processing apparatus, and storage medium | Hayato Iwamoto, Yoshiya Hagimoto, Tomoki Tetsuka, Shinichiro Shimomura, Hiroki Sakurai +3 more | 2016-06-07 |
| 9321085 | Substrate processing method, storage medium storing computer program for implementing substrate processing method and substrate processing apparatus | Satoru Tanaka, Tatsuya Nagamatsu, Hiroyuki Suzuki, Yosuke Kawabuchi, Tsukasa Hirayama +1 more | 2016-04-26 |
| 8978671 | Substrate processing method and substrate processing apparatus | Satoru Tanaka, Takehiko Orii, Hirotaka Maruyama, Mitsunori Nakamori | 2015-03-17 |
| 8906165 | Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus | Naoyuki Okamura, Hirotaka Maruyama, Yosuke Kawabuchi | 2014-12-09 |
| 8545640 | Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus | Naoyuki Okamura, Yosuke Kawabuchi | 2013-10-01 |
| 8475668 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored therein | Hiroshi Tanaka, Yosuke Kawabuchi, Norihiro Ito, Fumihiro Kamimura, Takashi Yabuta +4 more | 2013-07-02 |
| 8371318 | Liquid processing apparatus, liquid processing method, and storage medium | Norihiro Ito, Yuji Kamikawa | 2013-02-12 |
| 8308870 | Cleaning apparatus, cleaning method and recording medium | Takashi Yabuta, Satoru Tanaka, Hirotaka Maruyama, Kouichi Eguchi | 2012-11-13 |
| 8303723 | Liquid processing apparatus, liquid processing method, and storage medium | Fumihiro Kamimura, Kazuki Kosai, Takashi Yabuta, Kenji Yokomizo, Shogo Mizota | 2012-11-06 |
| 7669472 | Liquid level detector and liquid processing system provided with the same | Koji Tanaka | 2010-03-02 |
| 6158141 | Apparatus and method for drying semiconductor substrate | Kazumi Asada, Hayato Iwamoto | 2000-12-12 |
| 6029371 | Drying treatment method and apparatus | Yuji Kamikawa, Shigenori Kitahara | 2000-02-29 |
| 5671544 | Substrate drying apparatus and substrate drying method | Kenji Yokomizo, Hiroshi Tanaka, Shori Mokuo | 1997-09-30 |
| 5575079 | Substrate drying apparatus and substrate drying method | Kenji Yokomizo, Hiroshi Tanaka, Shori Mokuo | 1996-11-19 |