Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11718740 | Method for producing thermoplastic elastomer composition | — | 2023-08-08 |
| 11183396 | Substrate processing method and substrate processing apparatus | — | 2021-11-23 |
| 9922849 | Substrate liquid processing apparatus having nozzle with multiple flow paths and substrate liquid processing method thereof | Yasuyuki Ido, Naoki Shindo, Takehiko Orii, Keisuke Egashira, Yosuke Hachiya +2 more | 2018-03-20 |
| 9362106 | Substrate processing method, substrate processing apparatus, and storage medium | Hayato Iwamoto, Yoshiya Hagimoto, Tomoki Tetsuka, Teruomi Minami, Hiroki Sakurai +3 more | 2016-06-07 |
| 9278768 | Process liquid changing method and substrate processing apparatus | Masatoshi Kasahara | 2016-03-08 |
| 9027573 | Substrate processing apparatus for maintaining a more uniform temperature during substrate processing | Hironobu Hyakutake | 2015-05-12 |
| 6357458 | Cleaning apparatus and cleaning method | Hiroshi Tanaka, Yuji Kamikawa | 2002-03-19 |
| 6241827 | Method for cleaning a workpiece | Hiroshi Tanaka, Yuji Kamikawa | 2001-06-05 |