Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8216391 | Substrate processing apparatus and substrate processing method | — | 2012-07-10 |
| 6954585 | Substrate processing method and apparatus | — | 2005-10-11 |
| 6715348 | Method and apparatus for detecting liquid level | — | 2004-04-06 |
| 6573482 | Heating device, liquid processing apparatus using the heating device and method of detecting failure thereof | — | 2003-06-03 |
| 6022185 | Substrate transferring device | — | 2000-02-08 |
| 5911232 | Ultrasonic cleaning device | Keiji Taguchi, Shigenori Kitahara | 1999-06-15 |
| 5845660 | Substrate washing and drying apparatus, substrate washing method, and substrate washing apparatus | Naoki Shindo, Yuuji Kamikawa, Yoshio Kumagai | 1998-12-08 |
| 5671544 | Substrate drying apparatus and substrate drying method | Kenji Yokomizo, Hiroshi Tanaka, Teruomi Minami | 1997-09-30 |
| 5666381 | Communication system used in semiconductor device manufacturing equipment | — | 1997-09-09 |
| 5575079 | Substrate drying apparatus and substrate drying method | Kenji Yokomizo, Hiroshi Tanaka, Teruomi Minami | 1996-11-19 |
| 5406092 | Apparatus and method using optical sensors recessed in channel walls for detector substrates in a support | — | 1995-04-11 |
| 5319216 | Substrate detector with light emitting and receiving elements arranged in staggered fashion and a polarization filter | Yoichi Deguchi, Mitsuo Nishi, Shinji Tadakuma | 1994-06-07 |
| 5266812 | Substrate detector with light emitting and receiving elements arranged in a staggered fashion | — | 1993-11-30 |