Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10236192 | Liquid processing apparatus, liquid processing method, and storage medium | Jun Nonaka, Shogo Mizota, Daisuke Saiki, Kazuhiro Teraoka, Takashi Yabuta | 2019-03-19 |
| 9862007 | Substrate liquid processing apparatus and method, and computer-readable recording medium with substrate liquid processing program recorded therein | Daisuke Saiki, Shogo Mizota, Takashi Yabuta, Jun Nonaka, Koji Tanaka +1 more | 2018-01-09 |
| 9321085 | Substrate processing method, storage medium storing computer program for implementing substrate processing method and substrate processing apparatus | Teruomi Minami, Satoru Tanaka, Hiroyuki Suzuki, Yosuke Kawabuchi, Tsukasa Hirayama +1 more | 2016-04-26 |
| 9192878 | Liquid processing apparatus | Shogo Mizota, Takashi Yabuta, Daisuke Saiki | 2015-11-24 |