Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10500617 | Substrate liquid treatment apparatus, tank cleaning method and non-transitory storage medium | — | 2019-12-10 |
| 10236192 | Liquid processing apparatus, liquid processing method, and storage medium | Jun Nonaka, Tatsuya Nagamatsu, Daisuke Saiki, Kazuhiro Teraoka, Takashi Yabuta | 2019-03-19 |
| 9862007 | Substrate liquid processing apparatus and method, and computer-readable recording medium with substrate liquid processing program recorded therein | Daisuke Saiki, Takashi Yabuta, Jun Nonaka, Tatsuya Nagamatsu, Koji Tanaka +1 more | 2018-01-09 |
| 9305767 | Liquid processing apparatus, liquid processing method and storage medium | Kenji Nishi, Kazuhiro Takeshita, Nobuhiro Ogata, Satoru Tanaka | 2016-04-05 |
| 9192878 | Liquid processing apparatus | Takashi Yabuta, Tatsuya Nagamatsu, Daisuke Saiki | 2015-11-24 |
| 8303723 | Liquid processing apparatus, liquid processing method, and storage medium | Teruomi Minami, Fumihiro Kamimura, Kazuki Kosai, Takashi Yabuta, Kenji Yokomizo | 2012-11-06 |
| 7678199 | Substrate cleaning method | Minami Teruomi, Kenji Yokomizo, Taira Masaki | 2010-03-16 |