Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476136 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Kenichi Shigetomi, Takeshi Saikusa, Eiichi Sekimoto, Takayuki Fukudome, Kousuke Yoshihara +2 more | 2022-10-18 |
| 10877376 | Light irradiating device | Ryo Shimada, Teruhiko Moriya | 2020-12-29 |
| 10795265 | Substrate processing apparatus, substrate processing method, and storage medium | Norihisa Koga, Yoshitaka Konishi, Naruaki Iida, Yuzo Ohishi | 2020-10-06 |
| 10638650 | Apparatus and method of loading components | Toshiro Hirakawa, Yoichiro Sugimoto, Kenji Ishiyama | 2020-04-28 |
| 10504757 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Kenichi Shigetomi, Takeshi Saikusa, Eiichi Sekimoto, Takayuki Fukudome, Kousuke Yoshihara +2 more | 2019-12-10 |
| 9305767 | Liquid processing apparatus, liquid processing method and storage medium | Kenji Nishi, Nobuhiro Ogata, Satoru Tanaka, Shogo Mizota | 2016-04-05 |
| 7998306 | Substrate processing apparatus | Koukichi Hiroshiro, Hideyuki Yamamoto, Takayuki Toshima | 2011-08-16 |
| 7205024 | Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film | Shinji Nagashima, Makoto Muramatsu, Yoji Mizutani, Kazutoshi Yano, Kyoshige Katayama | 2007-04-17 |
| 7087118 | Coating film forming apparatus and coating unit | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2006-08-08 |
| 6936107 | Coating film forming apparatus and coating unit | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2005-08-30 |
| 6872256 | Film forming unit | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2005-03-29 |
| 6860945 | Substrate coating unit and substrate coating method | Shinji Kobayashi, Takahiro Kitano, Masateru Morikawa, Yoshiyuki Kawafuchi | 2005-03-01 |
| 6808567 | Gas treatment apparatus | Shinji Nagashima, Yoji Mizutani, Kyoshige Katayama | 2004-10-26 |
| 6726775 | Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film | Shinji Nagashima, Makoto Muramatsu, Yoji Mizutani, Kazutoshi Yano, Kyoshige Katayama | 2004-04-27 |
| 6716478 | Coating film forming apparatus and coating film forming method | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2004-04-06 |
| 6676757 | Coating film forming apparatus and coating unit | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2004-01-13 |
| 6660096 | Gas treatment apparatus | Shinji Nagashima, Yoji Mizutani, Kyoshige Katayama | 2003-12-09 |
| 6627263 | Film forming apparatus and film forming method | Takahiro Kitano, Masateru Morikawa, Masami Akimoto | 2003-09-30 |
| 6616760 | Film forming unit | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2003-09-09 |
| 6605153 | Coating film forming apparatus | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2003-08-12 |
| 6589339 | Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film | Shinji Nagashima, Makoto Muramatsu, Yoji Mizutani, Kazutoshi Yano, Kyoshige Katayama | 2003-07-08 |
| 6514344 | Film forming unit | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2003-02-04 |
| 6416583 | Film forming apparatus and film forming method | Takahiro Kitano, Masateru Morikawa, Masami Akimoto | 2002-07-09 |
| 6383948 | Coating film forming apparatus and coating film forming method | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2002-05-07 |
| 6248168 | Spin coating apparatus including aging unit and solvent replacement unit | Shinji Nagashima, Makoto Muramatsu, Yoji Mizutani, Kazutoshi Yano, Kyoshige Katayama | 2001-06-19 |