| 7087118 |
Coating film forming apparatus and coating unit |
Takahiro Kitano, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more |
2006-08-08 |
| 6936107 |
Coating film forming apparatus and coating unit |
Takahiro Kitano, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more |
2005-08-30 |
| 6933015 |
Method of forming film |
Takahiro Kitano, Shinji Kobayashi, Yukihiko Esaki |
2005-08-23 |
| 6872256 |
Film forming unit |
Takahiro Kitano, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more |
2005-03-29 |
| 6860945 |
Substrate coating unit and substrate coating method |
Shinji Kobayashi, Takahiro Kitano, Kazuhiro Takeshita, Yoshiyuki Kawafuchi |
2005-03-01 |
| 6716478 |
Coating film forming apparatus and coating film forming method |
Takahiro Kitano, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more |
2004-04-06 |
| 6695922 |
Film forming unit |
Takahiro Kitano, Shinji Kobayashi, Yukihiko Esaki |
2004-02-24 |
| 6676757 |
Coating film forming apparatus and coating unit |
Takahiro Kitano, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more |
2004-01-13 |
| 6627263 |
Film forming apparatus and film forming method |
Takahiro Kitano, Masami Akimoto, Kazuhiro Takeshita |
2003-09-30 |
| 6616760 |
Film forming unit |
Takahiro Kitano, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more |
2003-09-09 |
| 6605153 |
Coating film forming apparatus |
Takahiro Kitano, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more |
2003-08-12 |
| 6599366 |
Substrate processing unit and processing method |
Takahiro Kitano, Shinji Kobayashi, Yukihiko Esaki |
2003-07-29 |
| 6537373 |
Method of forming film and apparatus thereof |
Takahiro Kitano, Shinji Kobayashi, Yukihiko Esaki |
2003-03-25 |
| 6514344 |
Film forming unit |
Takahiro Kitano, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more |
2003-02-04 |
| 6416583 |
Film forming apparatus and film forming method |
Takahiro Kitano, Masami Akimoto, Kazuhiro Takeshita |
2002-07-09 |
| 6383948 |
Coating film forming apparatus and coating film forming method |
Takahiro Kitano, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more |
2002-05-07 |
| 6371667 |
Film forming method and film forming apparatus |
Takahiro Kitano, Masami Akimoto, Tomohide Minami |
2002-04-16 |