| 7179504 |
Substrate processing method and substrate processing system |
Takahiro Kitano, Shinichi Sugimoto, Shinji Kobayashi, Naoya Hirakawa, Akira Fukutomi |
2007-02-20 |
| 7087118 |
Coating film forming apparatus and coating unit |
Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Norihisa Koga, Kazuhiro Takeshita +2 more |
2006-08-08 |
| 6936107 |
Coating film forming apparatus and coating unit |
Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Norihisa Koga, Kazuhiro Takeshita +2 more |
2005-08-30 |
| 6872256 |
Film forming unit |
Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Norihisa Koga, Kazuhiro Takeshita +2 more |
2005-03-29 |
| 6824616 |
Substrate processing method and substrate processing system |
Takahiro Kitano, Shinichi Sugimoto, Shinji Kobayashi, Naoya Hirakawa, Akira Fukutomi |
2004-11-30 |
| 6773510 |
Substrate processing unit |
Takahiro Kitano, Shinichi Sugimoto, Shinji Kobayashi, Naoya Hirakawa, Akira Fukutomi |
2004-08-10 |
| 6716478 |
Coating film forming apparatus and coating film forming method |
Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Norihisa Koga, Kazuhiro Takeshita +2 more |
2004-04-06 |
| 6676757 |
Coating film forming apparatus and coating unit |
Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Norihisa Koga, Kazuhiro Takeshita +2 more |
2004-01-13 |
| 6616760 |
Film forming unit |
Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Norihisa Koga, Kazuhiro Takeshita +2 more |
2003-09-09 |
| 6605153 |
Coating film forming apparatus |
Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Norihisa Koga, Kazuhiro Takeshita +2 more |
2003-08-12 |
| 6514344 |
Film forming unit |
Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Norihisa Koga, Kazuhiro Takeshita +2 more |
2003-02-04 |
| 6391111 |
Coating apparatus |
Akihiro Fujimoto, Kazuo Sakamoto, Izumi Hasegawa |
2002-05-21 |
| 6383948 |
Coating film forming apparatus and coating film forming method |
Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Norihisa Koga, Kazuhiro Takeshita +2 more |
2002-05-07 |
| 6193783 |
Apparatus and method for supplying a process solution |
Kazuo Sakamoto, Akihiro Fujimoto, Izumi Hasegawa |
2001-02-27 |
| 5882426 |
Method of cleaning a substrate by scrubbing |
Akira Yonemizu, Tomoko Hamada |
1999-03-16 |
| 5636401 |
Cleaning apparatus and cleaning method |
Akira Yonemizu, Tomoko Hamada |
1997-06-10 |