Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979474 | Heat treatment method, heat treatment apparatus and treatment system | Yuji Matsuyama, Yoji Mizutani, Shinji Nagashima | 2005-12-27 |
| 6936134 | Substrate processing apparatus and substrate processing method | Shigeyoshi Kojima | 2005-08-30 |
| 6652662 | Substrate surface processing apparatus and method | Akira Ishihara, Takanori Miyazaki | 2003-11-25 |
| 6491760 | Scrub washing method | Akira Ishihara, Takanori Miyazaki | 2002-12-10 |
| 6292972 | Scrub washing apparatus and scrub washing method | Akira Ishihara, Takanori Miyazaki | 2001-09-25 |
| 6261365 | Heat treatment method, heat treatment apparatus and treatment system | Yuji Matsuyama, Yoji Mizutani, Shinji Nagashima | 2001-07-17 |
| 6178580 | Processing apparatus | Akira Ishihara, Kazuyoshi Namba, Takanori Miyazaki | 2001-01-30 |
| 6173468 | Apparatus for washing both surfaces of a substrate | Yuji Matsuyama | 2001-01-16 |
| 6096233 | Method for wet etching of thin film | Hiroki Taniyama, Miyako Yamasaka, Hiroyuki Kudou | 2000-08-01 |
| 5985039 | Apparatus and method for washing both surfaces of a substrate | Yuji Matsuyama | 1999-11-16 |
| 5975097 | Processing apparatus for target processing substrate | Hiroyuki Kudou, Masami Akimoto | 1999-11-02 |
| 5964954 | Double-sided substrate cleaning apparatus and cleaning method using the same | Hiroyuki Matsukawa, Michiaki Matsushita, Akihiro Fujimoto, Takashi Takekuma, Hidetami Yaegashi +1 more | 1999-10-12 |
| 5958145 | Method for washing both surfaces of a substrate | Yuji Matsuyama | 1999-09-28 |
| 5882426 | Method of cleaning a substrate by scrubbing | Nobukazu Ishizaka, Tomoko Hamada | 1999-03-16 |
| 5858112 | Method for cleaning substrates | Masami Akimoto | 1999-01-12 |
| 5685039 | Cleaning apparatus | Tomoko Hamada, Mitiaki Matsushita, Kiyohisa Tateyama | 1997-11-11 |
| 5686143 | Resist treating method | Hiroyuki Matsukawa, Michiaki Matsushita, Akihiro Fujimoto, Takashi Takekuma, Hidetami Yaegashi +1 more | 1997-11-11 |
| 5651160 | Cleaning apparatus for cleaning substrates | Masami Akimoto | 1997-07-29 |
| 5636401 | Cleaning apparatus and cleaning method | Nobukazu Ishizaka, Tomoko Hamada | 1997-06-10 |
| 5518542 | Double-sided substrate cleaning apparatus | Hiroyuki Matsukawa, Michiaki Matsushita, Akihiro Fujimoto, Takashi Takekuma, Hidetami Yaegashi +1 more | 1996-05-21 |