Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9875915 | Method for removing metal contamination and apparatus for removing metal contamination | Yudai ITO, Kazuya Dobashi, Misako Saito, Hideki Nishimura | 2018-01-23 |
| 6936134 | Substrate processing apparatus and substrate processing method | Akira Yonemizu | 2005-08-30 |
| 6786974 | Insulating film forming method and insulating film forming apparatus | Takayuki Komiya, Shinji Nagashima | 2004-09-07 |
| 6573191 | Insulating film forming method and insulating film forming apparatus | Takayuki Komiya, Shinji Nagashima | 2003-06-03 |