Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11867496 | Measurement system, measurement support method, and computer-readable medium | Yosuke TANI, Hirofumi Hori, Takahiro Furukawa, Tsukasa NITTONO | 2024-01-09 |
| 8679978 | Method for forming a film including Zr, Hf or the like, and method for manufacturing a semiconductor device using the same | — | 2014-03-25 |
| 6786974 | Insulating film forming method and insulating film forming apparatus | Shinji Nagashima, Shigeyoshi Kojima | 2004-09-07 |
| 6573191 | Insulating film forming method and insulating film forming apparatus | Shinji Nagashima, Shigeyoshi Kojima | 2003-06-03 |
| 6515945 | Recording media library apparatus with a function to detect a position of a recording medium transferred in the library | Hiroyuki Suzuki, Katsumasa Yokoyama, Hitoshi Kimura | 2003-02-04 |
| 6001729 | Method of forming wiring structure for semiconductor device | Hiroshi Shinriki, Hiroshi Yamamoto | 1999-12-14 |
| 5904557 | Method for forming multilevel interconnection of semiconductor device | Yumiko Kawano | 1999-05-18 |
| 5834846 | Semiconductor device with contact structure and method of manufacturing the same | Hiroshi Shinriki, Hiroshi Yamamoto | 1998-11-10 |
| 5830280 | Washing liquid for post-polishing and polishing-cleaning method in semiconductor process | Yoshihide Sato, Hiroki Ohno | 1998-11-03 |
| 5652180 | Method of manufacturing semiconductor device with contact structure | Hiroshi Shinriki, Hiroshi Yamamoto, Nobuyuki Takeyasu, Tomohiro Ohta | 1997-07-29 |