Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7520936 | Hardening processing apparatus, hardening processing method, and coating film forming apparatus | Tomohiro Iseki | 2009-04-21 |
| 7205024 | Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film | Kazuhiro Takeshita, Makoto Muramatsu, Yoji Mizutani, Kazutoshi Yano, Kyoshige Katayama | 2007-04-17 |
| 6982002 | Apparatus and method for forming coating film | Takashi Tanaka | 2006-01-03 |
| 6979474 | Heat treatment method, heat treatment apparatus and treatment system | Yuji Matsuyama, Yoji Mizutani, Akira Yonemizu | 2005-12-27 |
| 6827973 | Substrate processing method | — | 2004-12-07 |
| 6808567 | Gas treatment apparatus | Kazuhiro Takeshita, Yoji Mizutani, Kyoshige Katayama | 2004-10-26 |
| 6786974 | Insulating film forming method and insulating film forming apparatus | Takayuki Komiya, Shigeyoshi Kojima | 2004-09-07 |
| 6730620 | Substrate processing method and substrate processing apparatus | Kei Miyazaki, Yuichiro Uchihama, Kenji Yasuda, Kiminari Sakaguchi | 2004-05-04 |
| 6726775 | Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film | Kazuhiro Takeshita, Makoto Muramatsu, Yoji Mizutani, Kazutoshi Yano, Kyoshige Katayama | 2004-04-27 |
| 6673155 | Apparatus for forming coating film and apparatus for curing the coating film | Hiroyuki Miyamoto, Shizuo Ogawa, Shinji Koga | 2004-01-06 |
| 6665952 | Method for heat processing of substrate | — | 2003-12-23 |
| 6660096 | Gas treatment apparatus | Kazuhiro Takeshita, Yoji Mizutani, Kyoshige Katayama | 2003-12-09 |
| 6605550 | Substrate processing method and substrate processing apparatus | — | 2003-08-12 |
| 6590186 | Heat treatment apparatus and method | Takashi Tanaka | 2003-07-08 |
| 6589339 | Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film | Kazuhiro Takeshita, Makoto Muramatsu, Yoji Mizutani, Kazutoshi Yano, Kyoshige Katayama | 2003-07-08 |
| 6573191 | Insulating film forming method and insulating film forming apparatus | Takayuki Komiya, Shigeyoshi Kojima | 2003-06-03 |
| 6564474 | Apparatus for heat processing of substrate | — | 2003-05-20 |
| 6501191 | Heat treatment apparatus and method | Takashi Tanaka, Hiroyuki Sakai | 2002-12-31 |
| 6419751 | Substrate processing method and substrate processing apparatus | — | 2002-07-16 |
| 6413317 | Substrate processing method and substrate processing apparatus | Kei Miyazaki, Yuichiro Uchihama, Kenji Yasuda, Kiminari Sakaguchi | 2002-07-02 |
| 6350316 | Apparatus for forming coating film | Shinichi Hayashi | 2002-02-26 |
| 6261365 | Heat treatment method, heat treatment apparatus and treatment system | Yuji Matsuyama, Yoji Mizutani, Akira Yonemizu | 2001-07-17 |
| 6248168 | Spin coating apparatus including aging unit and solvent replacement unit | Kazuhiro Takeshita, Makoto Muramatsu, Yoji Mizutani, Kazutoshi Yano, Kyoshige Katayama | 2001-06-19 |
| 6197385 | Film forming apparatus, substrate conveying apparatus, film forming method, and substrate conveying method | Kazuhiro Takeshita, Yoji Mizutani | 2001-03-06 |
| 6190459 | Gas treatment apparatus | Kazuhiro Takeshita, Yoji Mizutani, Kyoshige Katayama | 2001-02-20 |