KY

Kazutoshi Yano

TL Tokyo Electron Limited: 4 patents #1,723 of 5,567Top 35%
Overall (All Time): #1,254,659 of 4,157,543Top 35%
4
Patents All Time

Issued Patents All Time

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
7205024 Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film Kazuhiro Takeshita, Shinji Nagashima, Makoto Muramatsu, Yoji Mizutani, Kyoshige Katayama 2007-04-17
6726775 Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film Kazuhiro Takeshita, Shinji Nagashima, Makoto Muramatsu, Yoji Mizutani, Kyoshige Katayama 2004-04-27
6589339 Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film Kazuhiro Takeshita, Shinji Nagashima, Makoto Muramatsu, Yoji Mizutani, Kyoshige Katayama 2003-07-08
6248168 Spin coating apparatus including aging unit and solvent replacement unit Kazuhiro Takeshita, Shinji Nagashima, Makoto Muramatsu, Yoji Mizutani, Kyoshige Katayama 2001-06-19