Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7205024 | Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film | Kazuhiro Takeshita, Shinji Nagashima, Makoto Muramatsu, Yoji Mizutani, Kazutoshi Yano | 2007-04-17 |
| 6808567 | Gas treatment apparatus | Kazuhiro Takeshita, Shinji Nagashima, Yoji Mizutani | 2004-10-26 |
| 6726775 | Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film | Kazuhiro Takeshita, Shinji Nagashima, Makoto Muramatsu, Yoji Mizutani, Kazutoshi Yano | 2004-04-27 |
| 6660096 | Gas treatment apparatus | Kazuhiro Takeshita, Shinji Nagashima, Yoji Mizutani | 2003-12-09 |
| 6589339 | Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film | Kazuhiro Takeshita, Shinji Nagashima, Makoto Muramatsu, Yoji Mizutani, Kazutoshi Yano | 2003-07-08 |
| 6524389 | Substrate processing apparatus | Yuta Yoshimura, Takeshi Tamura | 2003-02-25 |
| 6354832 | Substrate processing apparatus and substrate processing method | Yuta Yoshimura, Kei Miyazaki, Takeshi Tamura | 2002-03-12 |
| 6248168 | Spin coating apparatus including aging unit and solvent replacement unit | Kazuhiro Takeshita, Shinji Nagashima, Makoto Muramatsu, Yoji Mizutani, Kazutoshi Yano | 2001-06-19 |
| 6190459 | Gas treatment apparatus | Kazuhiro Takeshita, Shinji Nagashima, Yoji Mizutani | 2001-02-20 |