Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8781787 | Substrate carrying mechanism, substrate carrying method and recording medium storing program including set of instructions to be executed to accomplish the substrate carrying method | Tokutarou Hayashi | 2014-07-15 |
| 6730620 | Substrate processing method and substrate processing apparatus | Kei Miyazaki, Yuichiro Uchihama, Kenji Yasuda, Shinji Nagashima | 2004-05-04 |
| 6413317 | Substrate processing method and substrate processing apparatus | Kei Miyazaki, Yuichiro Uchihama, Kenji Yasuda, Shinji Nagashima | 2002-07-02 |