SN

Shinji Nagashima

TL Tokyo Electron Limited: 26 patents #170 of 5,567Top 4%
TL Tokyo Electron Kyushu Limited: 1 patents #67 of 104Top 65%
Overall (All Time): #156,125 of 4,157,543Top 4%
26
Patents All Time

Issued Patents All Time

Showing 26–26 of 26 patents

Patent #TitleCo-InventorsDate
5826129 Substrate processing system Keizo Hasebe, Norio Semba, Masami Akimoto, Yoshio Kimura, Naruaki Iida +3 more 1998-10-20