Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6673155 | Apparatus for forming coating film and apparatus for curing the coating film | Shinji Nagashima, Hiroyuki Miyamoto, Shinji Koga | 2004-01-06 |
| 5980591 | System for processing a plurality of objects contained in a plurality of cassettes | Masami Akimoto, Toshihiko Nagano | 1999-11-09 |
| 5803932 | Resist processing apparatus having an interface section including two stacked substrate waiting tables | Masami Akimoto, Toshihiko Nagano | 1998-09-08 |