Issued Patents All Time
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10215996 | Light source device | Takashi Sakamoto | 2019-02-26 |
| 9420615 | Information processing apparatus, information processing method, and program | Masato Shimakawa | 2016-08-16 |
| 8768684 | Apparatus, method and program for processing information | Atsushi Mitsuzawa, Toshihiko Kawai | 2014-07-01 |
| 8641202 | Projection display device | Hisashi Okada, Kazuya Minami, Yosuke Nishihata | 2014-02-04 |
| 7813397 | Nitride semiconductor laser device | Shinji Suzuki, Kousuke Ise, Atsuo Michiue, Akinori Yoneda | 2010-10-12 |
| 7517217 | Method and apparatus for heat processing of substrate | Masatoshi Deguchi, Eiichi Sekimoto, Koichi Asaka | 2009-04-14 |
| 7408199 | Nitride semiconductor laser device and nitride semiconductor device | Shinji Suzuki, Kousuke Ise, Atsuo Michiue, Akinori Yoneda | 2008-08-05 |
| 7208066 | Substrate processing apparatus and substrate processing method | Junichi Kitano, Takahiro Kitano, Takayuki Katano, Hidefumi Matsui, Yo Suzuki +7 more | 2007-04-24 |
| 7022190 | Substrate coating unit and substrate coating method | — | 2006-04-04 |
| 6979474 | Heat treatment method, heat treatment apparatus and treatment system | Yoji Mizutani, Shinji Nagashima, Akira Yonemizu | 2005-12-27 |
| 6969538 | Method for heat processing of substrate | Masatoshi Deguchi, Eiichi Sekimoto, Koichi Asaka | 2005-11-29 |
| 6884298 | Method and system for coating and developing | Junichi Kitano, Takahiro Kitano, Hidetami Yaegashi | 2005-04-26 |
| 6875281 | Method and system for coating and developing | Junichi Kitano, Takahiro Kitano | 2005-04-05 |
| 6672779 | Substrate processing apparatus and substrate processing method | Issei Ueda, Shinichi Hayashi, Naruaki Iida, Yoichi Deguchi | 2004-01-06 |
| 6655891 | Substrate treatment system, substrate transfer system, and substrate transfer method | Issei Ueda, Masami Akimoto, Kazuhiko Ito, Mitiaki Matsushita, Masatoshi Kaneda | 2003-12-02 |
| 6633022 | Substrate processing apparatus and substrate processing method | Takahiro Kitano, Junichi Kitano | 2003-10-14 |
| 6632281 | Substrate processing apparatus and substrate processing method | Junichi Kitano | 2003-10-14 |
| 6620248 | Coating apparatus and mixing apparatus | Takahiro Kitano, Junichi Kitano, Hiroyuki Hara | 2003-09-16 |
| 6602382 | Solution processing apparatus | Shuichi Nagamine | 2003-08-05 |
| 6585430 | System and method for coating and developing | Junichi Kitano, Takahiro Kitano | 2003-07-01 |
| 6533864 | Solution processing apparatus and method | Shuichi Nagamine | 2003-03-18 |
| 6518199 | Method and system for coating and developing | Junichi Kitano, Takahiro Kitano, Hidetami Yaegashi | 2003-02-11 |
| 6514570 | Solution processing apparatus and method | Shuichi Nagamine | 2003-02-04 |
| 6485893 | Resist pattern forming method and film forming method | — | 2002-11-26 |
| 6471422 | Substrate processing apparatus and substrate processing method | Issei Ueda, Shinichi Hayashi, Naruaki Iida, Yoichi Deguchi | 2002-10-29 |