Issued Patents All Time
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6467976 | Coating and developing system | Junichi Kitano, Takahiro Kitano | 2002-10-22 |
| 6425722 | Substrate treatment system, substrate transfer system, and substrate transfer method | Issei Ueda, Masami Akimoto, Kazuhiko Ito, Mitiaki Matsushita, Masatoshi Kaneda | 2002-07-30 |
| 6402821 | Filter unit and solution treatment unit | — | 2002-06-11 |
| 6402401 | Substrate processing apparatus and substrate processing method | Issei Ueda, Shinichi Hayashi, Naruaki Iida, Yoichi Deguchi | 2002-06-11 |
| 6384894 | Developing method and developing unit | Shuichi Nagamine | 2002-05-07 |
| 6364547 | Solution processing apparatus | Shuichi Nagamine | 2002-04-02 |
| 6332723 | Substrate processing apparatus and method | Shuichi Nagamine, Koichi Asaka | 2001-12-25 |
| 6312171 | Developing apparatus and method thereof | Masahito Hamada | 2001-11-06 |
| 6292250 | Substrate process apparatus | — | 2001-09-18 |
| 6287025 | Substrate processing apparatus | — | 2001-09-11 |
| 6261365 | Heat treatment method, heat treatment apparatus and treatment system | Yoji Mizutani, Shinji Nagashima, Akira Yonemizu | 2001-07-17 |
| 6246030 | Heat processing method and apparatus | — | 2001-06-12 |
| 6224274 | Semiconductor processing apparatus | — | 2001-05-01 |
| 6215545 | Substrate processing apparatus | — | 2001-04-10 |
| 6173468 | Apparatus for washing both surfaces of a substrate | Akira Yonemizu | 2001-01-16 |
| 6074154 | Substrate treatment system, substrate transfer system, and substrate transfer method | Issei Ueda, Masami Akimoto, Kazuhiko Ito, Mitiaki Matsushita, Masatoshi Kaneda | 2000-06-13 |
| 6015066 | Liquid supplying device | Yoshio Kimura, Satoshi Morita, Norio Semba | 2000-01-18 |
| 5985039 | Apparatus and method for washing both surfaces of a substrate | Akira Yonemizu | 1999-11-16 |
| 5958145 | Method for washing both surfaces of a substrate | Akira Yonemizu | 1999-09-28 |
| 5374312 | Liquid coating system | Keizo Hasebe, Kiyohisa Tateyama, Yuji Yoshimoto, Tetsuro Nakahara, Yoshio Kimura | 1994-12-20 |
| 5035200 | Processing liquid supply unit | Masashi Moriyama, Yutaka Yamahira | 1991-07-30 |