Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755952 | Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium | Norihiko Sasagawa, Hiroichi Inada | 2020-08-25 |
| 10074548 | Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium | Norihiko Sasagawa, Hiroichi Inada | 2018-09-11 |
| 8343284 | Film removing device and film removing method | Shigenori Kamei, Kotaro Ooishi | 2013-01-01 |
| 8277884 | Coating and processing apparatus and method | Shinji Kobayashi, Tetsushi Miyamoto, Masatoshi Kaneda | 2012-10-02 |
| 8016976 | Film removing device and film removing method | Shigenori Kamei, Kotaro Ooishi | 2011-09-13 |
| 7927657 | Liquid processing apparatus and liquid processing method | Shinji Kobayashi, Tetsushi Miyamoto | 2011-04-19 |
| 7819594 | Development processing device | Hideo Funakoshi, Yoshiki Okamoto | 2010-10-26 |
| 7615117 | Coating and processing apparatus and method | Shinji Kobayashi, Tetsushi Miyamoto, Masatoshi Kaneda | 2009-11-10 |
| 7566365 | Liquid processing apparatus and liquid processing method | Shinji Kobayashi, Tetsushi Miyamoto | 2009-07-28 |
| 7553374 | Coating treatment apparatus and coating treatment method | Fumio Hirota, Shinji Kobayashi | 2009-06-30 |
| 6312171 | Developing apparatus and method thereof | Yuji Matsuyama | 2001-11-06 |