SK

Shigenori Kamei

TL Tokyo Electron Limited: 3 patents #2,069 of 5,567Top 40%
Overall (All Time): #1,530,052 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
8707893 Substrate treatment system, substrate treatment method, and non-transitory computer storage medium Masatoshi Deguchi, Hideo Funakoshi, Toshichika Takei, Norifumi Sato, Wataru Kiyota +3 more 2014-04-29
8343284 Film removing device and film removing method Kotaro Ooishi, Masahito Hamada 2013-01-01
8016976 Film removing device and film removing method Kotaro Ooishi, Masahito Hamada 2011-09-13