Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12204256 | Substrate processing apparatus | Kouichi Mizunaga | 2025-01-21 |
| 11868056 | Substrate processing apparatus | Kouichi Mizunaga | 2024-01-09 |
| 8707893 | Substrate treatment system, substrate treatment method, and non-transitory computer storage medium | Masatoshi Deguchi, Hideo Funakoshi, Norifumi Sato, Wataru Kiyota, Daisuke Ishimaru +3 more | 2014-04-29 |
| 7431584 | Heat processing apparatus and heat processing method | Masatoshi Kaneda | 2008-10-07 |
| 7151239 | Heat treating apparatus and heat treating method | Masatoshi Kaneda | 2006-12-19 |
| 7049553 | Substrate processing apparatus and substrate processing method | Kenichi Shigetomi, Nobuyuki Sata, Masatoshi Kaneda | 2006-05-23 |
| 6932868 | Coating film forming apparatus | Takahiro Kitano, Norihisa Koga, Yoshiyuki Kawafuchi | 2005-08-23 |
| 6811613 | Coating film forming apparatus | Takahiro Kitano, Norihisa Koga, Yoshiyuki Kawafuchi | 2004-11-02 |
| 6761125 | Coating film forming system | Takahiro Kitano, Yoshiyuki Kawafuchi, Norihisa Koga | 2004-07-13 |
| 6644964 | Substrate processing apparatus and substrate processing method | Eiichi Shirakawa | 2003-11-11 |
| 6474986 | Hot plate cooling method and heat processing apparatus | Tetsuya Oda, Mitsuhiro Tanoue, Eiichi Shirakawa | 2002-11-05 |
| 6450805 | Hot plate cooling method and heat processing apparatus | Tetsuya Oda, Mitsuhiro Tanoue | 2002-09-17 |