YK

Yoshiyuki Kawafuchi

TL Tokyo Electron Limited: 4 patents #1,723 of 5,567Top 35%
Overall (All Time): #1,261,399 of 4,157,543Top 35%
4
Patents All Time

Issued Patents All Time

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
6932868 Coating film forming apparatus Takahiro Kitano, Norihisa Koga, Toshichika Takei 2005-08-23
6860945 Substrate coating unit and substrate coating method Shinji Kobayashi, Takahiro Kitano, Masateru Morikawa, Kazuhiro Takeshita 2005-03-01
6811613 Coating film forming apparatus Takahiro Kitano, Norihisa Koga, Toshichika Takei 2004-11-02
6761125 Coating film forming system Takahiro Kitano, Norihisa Koga, Toshichika Takei 2004-07-13