Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12204256 | Substrate processing apparatus | Toshichika Takei | 2025-01-21 |
| 11868056 | Substrate processing apparatus | Toshichika Takei | 2024-01-09 |
| 11842906 | Heating treatment apparatus and heating treatment method | Hideaki Iwasaka, Takahiro Hayashida | 2023-12-12 |
| 11637035 | Substrate processing apparatus with moving device for connecting and disconnecting heater electrodes and substrate processing method thereof | Satoshi Morita, Masami Akimoto, Katsuhiro Morikawa | 2023-04-25 |
| 11600500 | Substrate processing method | Kouzou Tachibana, Katsuhiro Morikawa | 2023-03-07 |
| 11551945 | Substrate processing apparatus including periphery cover body | Katsuhiro Morikawa, Masami Akimoto, Satoshi Morita | 2023-01-10 |
| 11510284 | Substrate processing apparatus | Satoshi Morita, Masami Akimoto, Katsuhiro Morikawa, Kouzou Kawahara | 2022-11-22 |
| 11208725 | Substrate processing apparatus | Masami Akimoto, Satoshi Morita, Katsuhiro Morikawa | 2021-12-28 |
| 10964564 | Heating treatment apparatus and heating treatment method | Hideaki Iwasaka, Takahiro Hayashida | 2021-03-30 |
| 8858710 | Chemical solution vaporizing tank and chemical solution treating system | Hiroyuki Kudoh, Kazuhiko Ooshima | 2014-10-14 |
| 8776393 | Substrate cooling apparatus, substrate cooling method, and storage medium | Yasuhiro Kuga, Masatoshi Kaneda | 2014-07-15 |
| 8375884 | Substrate processing apparatus | — | 2013-02-19 |