Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12409470 | Substrate processing apparatus and substrate processing method | Teruhiko Kodama, Koichi Matsunaga | 2025-09-09 |
| 11842906 | Heating treatment apparatus and heating treatment method | Kouichi Mizunaga, Takahiro Hayashida | 2023-12-12 |
| 10964564 | Heating treatment apparatus and heating treatment method | Kouichi Mizunaga, Takahiro Hayashida | 2021-03-30 |