Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276027 | Substrate processing apparatus and substrate processing method | Masami Akimoto, Mitsuaki Iwashita, Satoshi Kaneko | 2025-04-15 |
| 12109580 | Processing liquid nozzle and cleaning apparatus | Daisuke Goto, Takahiro Koga | 2024-10-08 |
| 11637035 | Substrate processing apparatus with moving device for connecting and disconnecting heater electrodes and substrate processing method thereof | Satoshi Morita, Masami Akimoto, Kouichi Mizunaga | 2023-04-25 |
| 11600500 | Substrate processing method | Kouzou Tachibana, Kouichi Mizunaga | 2023-03-07 |
| 11551945 | Substrate processing apparatus including periphery cover body | Masami Akimoto, Satoshi Morita, Kouichi Mizunaga | 2023-01-10 |
| 11532492 | Substrate processing apparatus and substrate processing method | Masami Akimoto | 2022-12-20 |
| 11515182 | Drying apparatus, substrate processing system, and drying method | — | 2022-11-29 |
| 11510284 | Substrate processing apparatus | Satoshi Morita, Masami Akimoto, Kouichi Mizunaga, Kouzou Kawahara | 2022-11-22 |
| 11244849 | Substrate transfer device and substrate transfer method | Yuta Matsushima | 2022-02-08 |
| 11208725 | Substrate processing apparatus | Kouichi Mizunaga, Masami Akimoto, Satoshi Morita | 2021-12-28 |
| 11097907 | Substrate transfer device and substrate transfer method | — | 2021-08-24 |
| 10460976 | Substrate transfer device and substrate transfer method | Yuta Matsushima | 2019-10-29 |
| 10128138 | Substrate transfer method and storage medium | Ikuo Sunaka, Seiji Nakano, Kazunori Kuratomi, Toshio Shimazu | 2018-11-13 |
| 10042356 | Substrate processing apparatus, method for correcting positional displacement, and storage medium | Naruaki Iida | 2018-08-07 |
| 9773690 | Substrate processing apparatus, substrate processing system, and method of detecting abnormality in transport container | Ikuo Sunaka, Suguru Enokida | 2017-09-26 |
| 9696262 | Substrate processing apparatus, method of operating substrate processing apparatus, and storage medium | Ikuo Sunaka | 2017-07-04 |
| 9666463 | Substrate processing apparatus | Issei Ueda, Akira Murata, Junya Minamida | 2017-05-30 |
| 9627238 | Substrate transfer apparatus, substrate transfer method, and storage medium | Ikuo Sunaka, Seiji Nakano, Kazunori Kuratomi, Toshio Shimazu | 2017-04-18 |
| 9373531 | Substrate transfer device, substrate processing apparatus, and substrate accommodation method | Akira Murata, Issei Ueda | 2016-06-21 |
| 8554360 | Substrate transfer method and substrate transfer apparatus | — | 2013-10-08 |
| 8528889 | Device and method for supporting a substrate | Seiji Nakano, Michiaki Matsushita, Naruaki Iida, Suguru Enokida | 2013-09-10 |
| 8441618 | Substrate transfer method and apparatus | Masahiro Nakaharada, Naruaki Iida, Suguru Enokida | 2013-05-14 |
| 7987019 | Substrate transfer method and substrate transfer apparatus | — | 2011-07-26 |
| 7602477 | Radar device | Mitsuo Nakamura | 2009-10-13 |
| 7563042 | Substrate carrying apparatus, substrate carrying method, and coating and developing apparatus | Masahiro Nakaharada, Seiki Ishida, Taro Yamamoto | 2009-07-21 |