Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128138 | Substrate transfer method and storage medium | Katsuhiro Morikawa, Ikuo Sunaka, Seiji Nakano, Kazunori Kuratomi | 2018-11-13 |
| 9627238 | Substrate transfer apparatus, substrate transfer method, and storage medium | Katsuhiro Morikawa, Ikuo Sunaka, Seiji Nakano, Kazunori Kuratomi | 2017-04-18 |