Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862489 | Substrate processing apparatus with electronic heater powered by power feeding coil | Satoshi Morita | 2024-01-02 |
| 11510284 | Substrate processing apparatus | Satoshi Morita, Masami Akimoto, Katsuhiro Morikawa, Kouichi Mizunaga | 2022-11-22 |
| 10201826 | Liquid coating method, liquid coating apparatus, and computer-readable storage medium | Katsunori Ichino, Takayuki Ishii, Daisuke Simokawa, Kazuyuki Tashiro | 2019-02-12 |