Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553421 | Substrate processing apparatus, substrate processing method and storage medium | Shogo Fukui, Hidetaka Shinohara | 2020-02-04 |
| 10290518 | Substrate liquid processing apparatus | Kento Kurusu, Yukiyoshi Saito | 2019-05-14 |
| 9889476 | Substrate processing apparatus and substrate processing method | — | 2018-02-13 |
| 9052610 | Coating and developing system and coating and developing method | Taro Yamamoto | 2015-06-09 |
| 8443513 | Substrate processing apparatus | Yukiyoshi Saito | 2013-05-21 |
| 8303232 | Substrate processing system | — | 2012-11-06 |
| 8154106 | Coating and developing system and coating and developing method | Taro Yamamoto | 2012-04-10 |
| 8033244 | Substrate processing system | Junya Minamida | 2011-10-11 |
| 7809460 | Coating and developing apparatus, coating and developing method and storage medium in which a computer-readable program is stored | Taro Yamamoto | 2010-10-05 |
| 7563042 | Substrate carrying apparatus, substrate carrying method, and coating and developing apparatus | Masahiro Nakaharada, Taro Yamamoto, Katsuhiro Morikawa | 2009-07-21 |
| 7284917 | Coating and developing system and coating and developing method | Masahiro Nakaharada, Taro Yamamoto | 2007-10-23 |
| 6620245 | Liquid coating apparatus with temperature controlling manifold | Junichi Iwano, Jun Ookura, Michishige Saito | 2003-09-16 |
| 6579370 | Apparatus and method for coating treatment | Yoshio Kimura | 2003-06-17 |