Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482428 | Substrate processing apparatus and substrate processing method | Nobuhiko Mouri | 2022-10-25 |
| 10643865 | Substrate cleaning apparatus | Yoshifumi Amano, Yuki Ito | 2020-05-05 |
| 10290518 | Substrate liquid processing apparatus | Yukiyoshi Saito, Seiki Ishida | 2019-05-14 |
| D843118 | Cleaning brush | Hidetaka Shinohara, Osamu Miyahara | 2019-03-19 |
| 9691646 | Substrate processing apparatus, substrate detection method of substrate processing apparatus and storage medium | Kohei Mori | 2017-06-27 |
| 9238256 | Substrate processing scrubber, substrate processing apparatus and substrate processing method | — | 2016-01-19 |
| D719591 | Substrate cleaning tool | — | 2014-12-16 |
| D719199 | Substrate cleaning tool | — | 2014-12-09 |