Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11084072 | Substrate processing apparatus, substrate processing method and recording medium | Shogo Fukui, Noritaka Uchida, Takanori Obaru, Shuuichi Nishikido, Tomohito Ura +1 more | 2021-08-10 |
| 10553421 | Substrate processing apparatus, substrate processing method and storage medium | Seiki Ishida, Shogo Fukui | 2020-02-04 |
| D843118 | Cleaning brush | Osamu Miyahara, Kento Kurusu | 2019-03-19 |