Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230515 | Substrate processing apparatus and substrate processing method | Nobuhiko Mouri, Yasushi Takiguchi, Teruhiko Kodama | 2025-02-18 |
| 11887869 | Substrate processing apparatus and substrate processing method | Nobuhiko Mouri, Yasushi Takiguchi, Teruhiko Kodama | 2024-01-30 |
| 11482429 | Substrate processing apparatus and substrate processing method | — | 2022-10-25 |
| 11139182 | Substrate processing apparatus and substrate processing method | Nobuhiko Mouri, Yasushi Takiguchi, Teruhiko Kodama | 2021-10-05 |
| 11084072 | Substrate processing apparatus, substrate processing method and recording medium | Shogo Fukui, Noritaka Uchida, Hidetaka Shinohara, Shuuichi Nishikido, Tomohito Ura +1 more | 2021-08-10 |