Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11084072 | Substrate processing apparatus, substrate processing method and recording medium | Shogo Fukui, Takanori Obaru, Hidetaka Shinohara, Shuuichi Nishikido, Tomohito Ura +1 more | 2021-08-10 |
| 9095953 | Apparatus for polishing rear surface of substrate, system for polishing rear surface of substrate, method for polishing rear surface of substrate and recording medium having program for polishing rear surface of substrate | Mitsunori Nakamori, Takehiko Orii, Takanori Miyazaki, Nobuhiko Mouri | 2015-08-04 |
| 8794250 | Substrate processing method and substrate processing apparatus | Takehiko Orii, Kenji Sekiguchi, Satoru Tanaka, Hiroki Ohno | 2014-08-05 |
| 8337659 | Substrate processing method and substrate processing apparatus | Takehiko Orii, Kenji Sekiguchi, Satoru Tanaka, Hiroki Ohno | 2012-12-25 |
| 8137478 | Substrate processing method and substrate processing apparatus | Kenji Sekiguchi, Satoru Tanaka, Hiroki Ohno | 2012-03-20 |
| 7914626 | Liquid processing method and liquid processing apparatus | Mitsunori Nakamori | 2011-03-29 |
| 7806989 | Substrate processing method and substrate processing apparatus | Kenji Sekiguchi, Satoru Tanaka, Hiroki Ohno | 2010-10-05 |
| 7731799 | Substrate processing method, substrate processing apparatus and computer-readable memory medium | Takayuki Toshima, Tadashi Iino, Yusuke Saito, Mitsunori Nakamori, Takehiko Orii | 2010-06-08 |
| 7693597 | Computer readable storage medium for controlling substrate processing apparatus | Mitsunori Nakamori, Tadashi Iino, Takehiko Orii | 2010-04-06 |