Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230515 | Substrate processing apparatus and substrate processing method | Takanori Obaru, Yasushi Takiguchi, Teruhiko Kodama | 2025-02-18 |
| 11887869 | Substrate processing apparatus and substrate processing method | Takanori Obaru, Yasushi Takiguchi, Teruhiko Kodama | 2024-01-30 |
| 11482428 | Substrate processing apparatus and substrate processing method | Kento Kurusu | 2022-10-25 |
| 11139182 | Substrate processing apparatus and substrate processing method | Takanori Obaru, Yasushi Takiguchi, Teruhiko Kodama | 2021-10-05 |
| 10665478 | Liquid processing apparatus | Shingo Kamitomo, Masakazu Yarimitsu, Takeru Hirose, Tomohito Ura | 2020-05-26 |
| 9095953 | Apparatus for polishing rear surface of substrate, system for polishing rear surface of substrate, method for polishing rear surface of substrate and recording medium having program for polishing rear surface of substrate | Mitsunori Nakamori, Noritaka Uchida, Takehiko Orii, Takanori Miyazaki | 2015-08-04 |
| 8356376 | Substrate cleaning apparatus, substrate cleaning method, and storage medium | Satoru Tanaka | 2013-01-22 |