Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230515 | Substrate processing apparatus and substrate processing method | Nobuhiko Mouri, Takanori Obaru, Teruhiko Kodama | 2025-02-18 |
| 11887869 | Substrate processing apparatus and substrate processing method | Nobuhiko Mouri, Takanori Obaru, Teruhiko Kodama | 2024-01-30 |
| 11554389 | Substrate cleaning apparatus and substrate cleaning method | Akihiro Kubo, Teruhiko Kodama, Yoshiki Okamoto | 2023-01-17 |
| 11532487 | Substrate processing apparatus | Akihiro Kubo, Teruhiko Kodama, Yoshiki Okamoto, Hayato Hosaka | 2022-12-20 |
| 11139182 | Substrate processing apparatus and substrate processing method | Nobuhiko Mouri, Takanori Obaru, Teruhiko Kodama | 2021-10-05 |
| 11059145 | Dressing apparatus and dressing method for substrate rear surface polishing member | Yoshiki Okamoto, Akihiro Kubo, Hayato Hosaka, Ryuto Ozasa | 2021-07-13 |
| 11031261 | Liquid processing apparatus | Koki Yoshimura, Taro Yamamoto, Hideharu Kyouda, Koshi MUTA | 2021-06-08 |
| 10840079 | Substrate processing apparatus, substrate processing method and storage medium | Taro Yamamoto, Yoshiki Okamoto, Hayato Hosaka, Teruhiko Kodama, Akihiro Kubo +3 more | 2020-11-17 |
| 10649334 | Liquid processing apparatus | Koki Yoshimura, Shogo Takahasi, Taro Yamamoto | 2020-05-12 |
| 10289004 | Developing apparatus, developing method and storage medium | Kousuke Yoshihara, Hideharu Kyouda, Koshi MUTA, Taro Yamamoto | 2019-05-14 |
| 10168618 | Liquid processing method and storage medium | Norihiko Sasagawa, Hiroichi Inada | 2019-01-01 |
| 10120285 | Developing method, developing apparatus and storage medium | Kousuke Yoshihara, Hideharu Kyouda, Koshi MUTA, Taro Yamamoto, Masahiro Fukuda | 2018-11-06 |
| 10014190 | Liquid processing apparatus | Koki Yoshimura, Taro Yamamoto, Hideharu Kyouda, Koshi MUTA | 2018-07-03 |
| 9947556 | Substrate cleaning apparatus, substrate cleaning method, and storage medium | Taro Yamamoto, Hideharu Kyouda, Koshi MUTA | 2018-04-17 |
| 9869941 | Substrate cleaning method, substrate cleaning apparatus, and computer-readable storage medium | Ryoichi Uemura | 2018-01-16 |
| 9716002 | Substrate cleaning method | Taro Yamamoto, Akihiro Fujimoto, Shuuichi Nishikido, Dai Kumagai, Naoto Yoshitaka +2 more | 2017-07-25 |
| 9575411 | Developing apparatus, developing method and storage medium | Kousuke Yoshihara, Hideharu Kyouda, Koshi MUTA, Taro Yamamoto | 2017-02-21 |
| 9570326 | Substrate cleaning method, substrate cleaning apparatus, and computer-readable storage medium | Ryoichi Uemura | 2017-02-14 |
| 9568829 | Developing method, developing apparatus and storage medium | Kousuke Yoshihara, Hideharu Kyouda, Koshi MUTA, Taro Yamamoto, Masahiro Fukuda | 2017-02-14 |
| 9470979 | Developing treatment apparatus and developing treatment method | Taro Yamamoto, Yoshinori Ikeda, Koki Yoshimura, Yoshiki Okamoto, Masahiro Fukuda | 2016-10-18 |
| 9304398 | Developing treatment apparatus and developing treatment method | Taro Yamamoto, Yoshinori Ikeda, Koki Yoshimura, Yoshiki Okamoto, Masahiro Fukuda | 2016-04-05 |
| 9195138 | Liquid processing apparatus, liquid processing method and storage medium | Norihiko Sasagawa, Hiroichi Inada | 2015-11-24 |
| 8636915 | Liquid processing apparatus and liquid processing method | Taro Yamamoto, Tsutomu Yamahata, Akihiro Fujimoto, Kouji Fujimura | 2014-01-28 |
| 8578953 | Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage medium | Taro Yamamoto, Akihiro Fujimoto, Shuuichi Nishikido, Dai Kumagai, Naoto Yoshitaka +2 more | 2013-11-12 |
| 8337104 | Developing apparatus, developing method and storage medium | Taro Yamamoto, Hiroshi Arima, Kousuke Yoshihara, Yuichi Yoshida | 2012-12-25 |