Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755952 | Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium | Hiroichi Inada, Masahito Hamada | 2020-08-25 |
| 10168618 | Liquid processing method and storage medium | Hiroichi Inada, Yasushi Takiguchi | 2019-01-01 |
| 10074548 | Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium | Hiroichi Inada, Masahito Hamada | 2018-09-11 |
| 9195138 | Liquid processing apparatus, liquid processing method and storage medium | Hiroichi Inada, Yasushi Takiguchi | 2015-11-24 |
| 7326299 | Process liquid supply nozzle, process liquid supply device and nozzle cleaning method | Makoto Muramatsu, Hitoshi Hashima, Takeshi Hirao | 2008-02-05 |