Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12321098 | Substrate support member, substrate treatment apparatus, and substrate transfer apparatus | — | 2025-06-03 |
| 12077392 | Substrate transfer apparatus and substrate transfer method | Tohru TOCHIHARA, Michiaki Matsushita, Hidekazu Kiyama | 2024-09-03 |
| 10549302 | Operating method of processing liquid supply apparatus and recording medium | — | 2020-02-04 |
| 9943871 | Processing liquid supply apparatus, operating method of processing liquid supply apparatus, and recording medium | — | 2018-04-17 |
| 7326299 | Process liquid supply nozzle, process liquid supply device and nozzle cleaning method | Makoto Muramatsu, Norihiko Sasagawa, Takeshi Hirao | 2008-02-05 |