YT

Yasushi Takiguchi

TL Tokyo Electron Limited: 29 patents #135 of 5,567Top 3%
Overall (All Time): #127,208 of 4,157,543Top 4%
29
Patents All Time

Issued Patents All Time

Showing 26–29 of 29 patents

Patent #TitleCo-InventorsDate
8333522 Developing apparatus, developing method and storage medium Hiroshi Arima, Kousuke Yoshihara, Yuichi Yoshida, Taro Yamamoto 2012-12-18
8262300 Coating and developing apparatus, developing method and non-transitory medium Taro Yamamoto, Hiroshi Arima, Kousuke Yoshihara, Yuichi Yoshida 2012-09-11
7959988 Coating film forming apparatus and method Taro Yamamoto, Akihiro Fujimoto, Hideharu Kyouda, Junichi Kitano, Osamu Miyahara +1 more 2011-06-14
D610176 Coater cup Shuichi Nagamine, Naofumi Kishita, Koji Takayanagi, Yuichiro MIYATA 2010-02-16