Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9552987 | Substrate processing method, substrate processing apparatus, and storage medium | Keiichi Tanaka, Kenichi Ueda, Takahiro Shiozawa | 2017-01-24 |
| D610176 | Coater cup | Shuichi Nagamine, Naofumi Kishita, Koji Takayanagi, Yasushi Takiguchi | 2010-02-16 |