Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10699919 | Coating processing apparatus and coating liquid collecting member | — | 2020-06-30 |
| 9869941 | Substrate cleaning method, substrate cleaning apparatus, and computer-readable storage medium | Yasushi Takiguchi | 2018-01-16 |
| 9570326 | Substrate cleaning method, substrate cleaning apparatus, and computer-readable storage medium | Yasushi Takiguchi | 2017-02-14 |
| 8698052 | Temperature control method of heat processing plate, computer storage medium, and temperature control apparatus of heat processing plate | Masahide Tadokoro, Mitsuteru Yano, Shinichi Shinozuka | 2014-04-15 |
| 8242417 | Temperature control method of heat processing plate, computer storage medium, and temperature control apparatus of heat processing plate | Masahide Tadokoro, Mitsuteru Yano, Shinichi Shinozuka | 2012-08-14 |
| 7867674 | Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program | Michio Tanaka, Shinichi Shinozuka, Masahide Tadokoro, Kunie Ogata, Hiroshi Tomita | 2011-01-11 |
| 7867673 | Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program | Kunie Ogata, Hiroshi Tomita, Michio Tanaka | 2011-01-11 |
| 7862966 | Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program | Kunie Ogata, Hiroshi Tomita, Michio Tanaka | 2011-01-04 |
| 6921554 | Substrate processing method | Koji Harada | 2005-07-26 |
| 6402844 | Substrate processing method and substrate processing unit | Koji Harada | 2002-06-11 |