Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8916229 | Substrate processing method | Akira Miyata, Kenichirou Matsuyama | 2014-12-23 |
| 8885140 | Substrate treatment apparatus, substrate treatment method and non-transitory storage medium | Tomohiro Nakashima, Shin-ichi Inoue, Yoshitaka Hara, Izumi Hasegawa, Takuya Mori | 2014-11-11 |
| 8308381 | Substrate processing method, computer-readable storage medium, and substrate processing system | Masahide Tadokoro | 2012-11-13 |
| 8253077 | Substrate processing method, computer-readable storage medium and substrate processing system | Masahide Tadokoro, Tsuyoshi Shibata, Shinichi Shinozuka | 2012-08-28 |
| 8231285 | Substrate processing method and apparatus | Koki Nishimuko, Hiroshi Tomita, Yoshio Kimura, Ryouichi Uemura, Michio Tanaka | 2012-07-31 |
| 8135487 | Temperature setting method and apparatus for a thermal processing plate | Megumi Jyousaka, Masahide Tadokoro, Yoshitaka Konishi, Shinichi Shinozuka | 2012-03-13 |
| 8041525 | Substrate measuring method, computer-readable recording medium recording program thereon, and substrate measuring system | Yoshihiro Kondo, Shinichi Shinozuka | 2011-10-18 |
| 7985516 | Substrate processing method, computer-readable storage medium and substrate processing system | Masahide Tadokoro, Tsuyoshi Shibata, Shinichi Shinozuka | 2011-07-26 |
| 7968260 | Substrate processing method, computer-readable storage medium, and substrate processing system | Masahide Tadokoro | 2011-06-28 |
| 7968825 | Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plate | Megumi Jyousaka, Shinichi Shinozuka | 2011-06-28 |
| 7957828 | Temperature setting method for thermal processing plate, temperature setting apparatus for thermal processing plate, and computer-readable storage medium | Masahide Tadokoro, Megumi Jyousaka, Yoshitaka Konishi, Shinichi Shinozuka | 2011-06-07 |
| 7897896 | Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plate | Megumi Jyousaka, Shinichi Shinozuka | 2011-03-01 |
| 7884950 | Substrate processing method, program, computer-readable storage medium, and substrate processing system | Heiko Weichert, Tsuyoshi Shibata | 2011-02-08 |
| 7867674 | Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program | Michio Tanaka, Shinichi Shinozuka, Masahide Tadokoro, Hiroshi Tomita, Ryoichi Uemura | 2011-01-11 |
| 7867673 | Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program | Hiroshi Tomita, Michio Tanaka, Ryoichi Uemura | 2011-01-11 |
| 7862966 | Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program | Hiroshi Tomita, Michio Tanaka, Ryoichi Uemura | 2011-01-04 |
| 7822574 | Substrate measuring method, computer-readable recording medium recording program thereon, and substrate processing system | Shinichi Shinozuka, Yoshihiro Kondo | 2010-10-26 |
| 7780366 | Resist pattern forming method | Koki Nishimuko, Hiroshi Tomita, Yoshio Kimura, Ryouichi Uemura, Michio Tanaka | 2010-08-24 |
| 7488127 | Resist pattern forming apparatus and method thereof | Koki Nishimuko, Hiroshi Tomita, Yoshio Kimura, Ryouichi Uemura, Michio Tanaka | 2009-02-10 |
| 7031792 | Processing apparatus and information storage apparatus and method | Yuji Yoshimoto, Ryouichi Uemura, Yoichi Deguchi | 2006-04-18 |
| 6990380 | Substrate processing apparatus and information storage apparatus and method | Yuji Yoshimoto, Ryouichi Uemura, Yoichi Deguchi | 2006-01-24 |
| 6984477 | Resist pattern forming apparatus and method thereof | Koki Nishimuko, Hiroshi Tomita, Yoshio Kimura, Ryouichi Uemura, Michio Tanaka | 2006-01-10 |
| 6713120 | Substrate processing system and substrate processing method | Yuji Fukuda | 2004-03-30 |
| 6593045 | Substrate processing apparatus and method | Norikatsu Sato, Yoshio Kimura, Hiroshi Tomita, Seiji Nakashima, Hidehiko Kamiya | 2003-07-15 |
| 6541170 | Resist processing method controlled through reflectivity data | Yuji Fukuda | 2003-04-01 |